Equipment database

Name:
Spectroscopic ellipsometer
Producer:
Horiba-Jobin-Yvon
Model:
Uvisel
Research group:
Laboratory of Molecular Film Investigation
Description:

The UVISEL spectroscopic ellipsometer from Horiba- Jobin-Yvon (Longjumeau, France) makes it possible to work in the wavelength range from 245 to 2100 nm so that the thickness and optical parameters of mono- and multilayers of organic and inorganic materials can be determined. It is also possible to map the thickness and optical properties of the layers using a motorized mounting stage.

Contact:

dr Paweł Borowicz

Research

  • Type of measurement: Examination of the thickness of conductive polymer layers
  • Test method: Spectral ellipsometry

Details

  • Name of equipment: Horiba-Jobin-Yvon model: Uvisel
  • Type of measurement: Examination of the thickness of conductive polymer layers
  • Test method: Spectral ellipsometry
  • Opis:

    The applied polymer layer deposited on the gold layer vapour deposited on the gold plate is fixed in the handle of the automated table by means of a vacuum suction nozzle. It is levelled and then the appropriate signal amplification is set on the detector. Then, the sample is illuminated with light in the selected range from near infrared to ultraviolet with a given wavelength increment. During the measurement, the parameters degrees and Ψ (so-called ellipsometric angles) are recorded as a function of the wavelength. The curves obtained in this way are analyzed in order to obtain the optical parameters of the layer. This analysis involves fitting the model of the layer to experimentally obtained dependencies of ellipsometric angles from the wavelengths. With this fit, we obtain parameters of the layers such as their thickness, porosity, refractive indexes and absorption coefficients.

  • User performing the measurement: dr Paweł Borowicz
Measurement conditions
  • Parametr fizyczny: Roughness of the sample
  • Opis parametru: The surface unevenness should be smaller than the length of the light wave used. Samples that diffract and absorb light excessively do not allow for effective measurement.

  • Parametr fizyczny: Temperature
  • Opis parametru: Measurements are carried out at room temperature

  • Parametr fizyczny: The angle of incidence of light
  • Opis parametru: The device allows measurements at different angles of incidence (manual angle adjustment, change every 5 degrees) of light matched to the tested sample.